Titanium oxide thin films of 66 nm thickness at different deposition angles of 0, 25 and 35 degrees were deposited on glass substrates at room temperature, using resistive evaporation method under UHV conditions. The optical spectra were measured by spectrophotometer in the spectral range of 300 −1100 nm wave length (UV-VIS). The optical constants such as, real part of refractive index (n), imaginary part of refractive index (k), real and imaginary parts of dielectric function (ε1 , ε2) respectively and absorption coefficient(α), were obtained using the Kramers-Kronig analysis of reflectivity curves.\nBand-gap energy (Eg) was also estimated for these films. The structural details were determined by AFM and XRD methods. The relation between nanostructures and optical properties was also discussed.

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